THz waves have a plethora of applications ranging from biomedical and medical examinations, imaging, environmental monitoring, to wireless communications, because of abundant spectral information, low photon energy, strong penetrability, and shorter wavelength. THz waves with technological advances not only determined by high-efficiency sources and detectors but also decided by a variety of high-quality THz components/functional devices. However, traditional THz devices should be thick enough to realize the desired wave-manipulating functions, hindering the development of THz integrated systems and applications. Although metamaterials have shown groundbreaking discoveries due to tunable electric permittivity and magnetic permeability of a meta-atom, they are limited by technical challenges of fabrication and high loss of the metal-based unit cell.